Ion Beam Technology For Optical Applications
Colin Quinn and Peter Lindeman
Ion beam technology is playing an increasingly important role in the optics industry, from low-loss high end mirrors to diamond-like coatings on sunglasses. Ion beam sputter deposition, ion beam direct deposition, ion beam assisted deposition (reactive or inert), and ion beam precleaning are processes that greatly enhance optical surfaces and materials with which they interact. Broad beam Kaufman-type ion sources are capable of performing all of these applications. A beam of inert or reactive ions is generated in a discharge chamber by a hot filament and then accelerated to a work surface.
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