Surface metrology testing frequency footprints

Thomas C. Bristow

This article focuses on the spatial frequency content of optical surfaces and the corresponding frequency response of optical surface test instrumentation. The frequency components (amplitude and frequency distribution) of the surface, and the associated instrument's response function, may be as important in evaluating the performance of a surface as the modulation transfer function for specifying the performance of a lens. This article reviews several parameters necessary to describe the instrument response function for roughness testing. A recent review article discusses the history and development of several techniques for testing the figure of optics. Other references describe interferometry in greater detail.

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