Quantum Lithography

Optical lithography is used in the manufacture of microchips to etch patterns on silicon wafers. Because of diffraction, the size of these patterns is limited by the wavelength of the light used. The authors present a new lithographic protocol that uses the quantum properties of light. With this new technique, it is possible to beat the diffraction limit and, in principle, continue the miniaturization process until the atomic scale is reached.

Become a member or log in to view the full text of this article.

OSA Members get the full text of Optics & Photonics News, plus a variety of other member benefits.

Publish Date:

Quantum Lithography

Optical lithography is used in the manufacture of microchips to etch patterns on silicon wafers. Because of diffraction, the size of these patterns is limited by the wavelength of the light used. The authors present a new lithographic protocol that uses the quantum properties of light. With this new technique, it is possible to beat the diffraction limit and, in principle, continue the miniaturization process until the atomic scale is reached.

This article is only available as a PDF.

Download PDF

Publish Date:


Add a Comment

ADVERTISEMENT
ADVERTISEMENT