Interferometry for Accurate Displacement Metrology

John Lawall

The most accurate measurements of displacements are made with optical interferometry. The author discusses a quadruple heterodyne Michelson interferometer for active position control and the use of Fabry-Pérot interferometry for displacements of up to 50 mm.

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Interferometry for Accurate Displacement Metrology

John Lawall

The most accurate measurements of displacements are made with optical interferometry. The author discusses a quadruple heterodyne Michelson interferometer for active position control and the use of Fabry-Pérot interferometry for displacements of up to 50 mm.

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Publish Date: 01 October 2004


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