Stitching Interferometry: A Flexible Solution for Surface Metrology

Paul Murphy, Greg Forbes, Jon Fleig, Paul Dumas and Marc Tricard

The fabrication of large high-quality optics continues to be a challenge, in part because of the difficulty of measuring extensive surface areas. One alternative is to measure many subapertures of the surface and “stitch” the results together to synthesize a full aperture map.

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