Femtosecond-Laser-Assisted Microstructuring of Silicon Surfaces

James E. Carey, Catherine H. Crouch and Eric Mazur

Femtosecond-laser-assisted chemical etching is being used to microstructure silicon surfaces. The technique offers new opportunities in areas including photodetector, sensor and display applications.

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Femtosecond-Laser-Assisted Microstructuring of Silicon Surfaces

James E. Carey, Catherine H. Crouch and Eric Mazur

Femtosecond-laser-assisted chemical etching is being used to microstructure silicon surfaces. The technique offers new opportunities in areas including photodetector, sensor and display applications.

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Publish Date: 01 February 2003


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