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May, 1983

New laser semiconductor processing techniques offer hope for future integrated circuits

Howard Rausch

As microcircuits become smaller and more complex, and as competition among suppliers continues to heat up, manufacturers are considering broader roles for lasers in fabrication and process diagnostics. They are intrigued by the prospects of having available vast numbers of short-wavelength photons and a selection of high powers at a variety of wavelengths for selective photochemistry.



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