Magnified MEMS

Epi-illumination photomicrograph of MEMS device at 40X magnification. Colors result from thin-film interference between layers and coatings, and spatial interference occurs in the central section, where the spatial extent of features are near the diffraction limit of the imaging lens (40 mm Zeiss Epi-Luminar). –Andrew Resnick, Cleveland State Univ., U.S.A.

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