Transmission Electron Microscopy in Micro-nanoelectronics
Alain Claverie, Ed.
Wiley-ISTE, 2012; $145.00 (hardcover).
This is a remarkable reference on transmission electron microscopy (TEM) that includes applications for nanotechnology and micro-nanoelectronics. This accessible book will be useful for a wide readership, including researchers and students in material science, microscopy and physical chemistry.
Readers are introduced to electron holography as a powerful technique for TEM. Such techniques provide an enhancement for the latest generation of semiconductor materials, in particular doped nanowires and 3-D structures. This book also addresses topics such as interdiffusion and chemical reaction at interfaces, dopant distributions, specimen preparation for semiconductor analysis and the characterization of process-induced defects. The editor has included a wide range of experimental aspects of electron holography, including sampling, recording and reconstruction techniques.
Review by Axel Mainzer Koenig, CEO, 21st Century Data Analysis, a division of Koenig & Associates, Inc., Portland, Ore., U.S.A.
The opinions expressed in the book review section are those of the reviewer and do not necessarily reflect those of OPN or OSA.