A Practical Guide to Optical Metrology for Thin Films
Wiley, 2012; $99.95 (paperback).
This practical book covers the laws of electromagnetic radiation and interaction of light with matter, the theory and practice of thickness measurement and modern applications. The author shows the capabilities of optical thickness determination, and discusses the strengths and weaknesses of measurement devices when different thin-film measurement techniques are applied. This book will be useful for industrial and academic researchers, engineers, developers and manufacturers in all areas of optical layer and thin optical film measurement and metrology.
Review by Lisa Tongning Li, Inphenix, Livermore, Calif, U.S.A.
The opinions expressed in the book review section are those of the reviewer and do not necessarily reflect those of OPN or OSA.