Trends in Optical Lithography
The author describes optical lithography in the context of the semiconductor industry. Past trends are evaluated and used to predict future possibilities. The economics of the semiconductor industry, and thus optical lithography, is discussed and its impact on technology development explained. Wavefront engineering seems to be the most promising approach to extending the life of optical lithography in the near future.
Become a member or log in to view the full text of this article.
OSA Members get the full text of Optics & Photonics News, plus a variety of other member benefits.