The Meaning and Measure of Lateral Resolution for Surface Profiling Interferometers

Optical interferometers for surface characterization provide detailed information about surface topography, and they carry specifications related to the ultimate resolving power for 3-D imaging. It is worthwhile for engineers to understand the meaning of these specifications and the methods for validating them.

Access to the full text of this article is restricted. In order to view this article please log in.


Add a Comment

comments powered by Disqus