Interferometry for Accurate Displacement Metrology

The most accurate measurements of displacements are made with optical interferometry. The author discusses a quadruple heterodyne Michelson interferometer for active position control and the use of Fabry-Pérot interferometry for displacements of up to 50 mm.

Access to the full text of this article is restricted. In order to view this article please log in.


Add a Comment

comments powered by Disqus