Lithographic lenses for microcircuit fabrication
John H. Bruning
Reduction lenses used in the hightech cameras known as "steppers" to produce today's complex microchips represent one of the greatest set of challenges to optical engineers in design, as well as manufacturing science and technology. Lens technology
has tracked the explosive growth
that we have seen in microcircuit
complexity in the past decade, but it is difficult to predict just how much further optical technology can be pushed.
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