Semiconductor standards: A lesson for optics?
Robert E. Parks
This month we will again draw on material published by the National Bureau of Standards, in this case the NBS Research Report for August 1987. The report deals with NBS efforts in the area of linewidth standards for the semiconductor industry. Some of the problems in this area can be contrasted with the optics industry problem of inspection for surface beauty defects, in particular, scratches. A key factor to keep in mind is the relative economic importance of the semiconductor industry compared to the optical industry.
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