This article is only available as a PDF.
Feature OPEN
Neutral ion beam sputter deposition of high-quality optical films
The newest generation of high-accuracy ring laser gyroscopes (RLG) requires state-of-the-art optical coatings. The process of neutral ion beam deposition, developed in the last 10 years for the RLG application, has met this challenge.
Publish Date: 01 August 1986